CONVEYING DEVICE

PURPOSE:To easily change the direction of a conveyed article placed on belts without rubbing the article during its conveyance in a belt conveyer conveying a light weight part of wafer or the like, by parallelley arranging the belts so as to change their direction at an angle of 90 deg. on the way of conveyance. CONSTITUTION:Pulleys 3 provided in common shafts 4 are arranged with their shaft at an angle of 90 deg., and belts 1 are parallely arranged to the pulleys 3 then curved by direction changing pulleys 2 on the way of the belt to form a conveying line curved at a right angle. A wafer so placed as to ride over on these two belts is firstly fed to the direction X. The wafer arrives at a position 7 as shown by a one-dot chain-line circle, and the wafer, even if partially reaches an upper part of the belt 1 moving to the direction Y, is not contacted to the belt moving to the direction Y, then the wafer, when its center passes through a portion at which the belt 1 is changed its direction by the pulley 2, rides on the belt 1 moving to the direction Y by the own weight of the wafer and is detached from the belt 1 moving to the direction X. In this way, the wafer, always on the belt moving to one direction, can be smoothly conveyed.