ELECTRON BEAM DEVICE

PURPOSE:To confirm easily which portion in the view can be observed by executing the time shared switching of the electron beam scanning speed between high and low speeds and displaying the two kind of detection signals obtained from the specimen through the scanning. CONSTITUTION:The horizontal and vertical scanning signals are provided from a scanning signal generating circuit 7 to the deflection coil 11 in a signal selection circuit 8 and a cathode ray tube 10. The horizontal and vertical signals provided from a scanning signal generating circuit 12 having the period considerably shorter than that produced from said circuit 7 are provided respectively to the deflection coil 15 in the cathode ray tube 14 and the circuit 8. Then the circuit 8 will selectively provided the signal from the circuits 7, 12 to the deflection coil 6 by the switching signal in a switching signal generating circuit 16. When scanning the specimen 5 with low rate, the X-ray image of limited view is displayed by the detection signal from a X-ray detector 26 while when scanning with low rate the secondary electron image in the entire view is displayed by the detection signal from a secondary electron detector 22. Consequently it can be confirmed easily which portion in the view is observable.