JPS5753934

PURPOSE:To expedite the exposing speed by setting the timing of the stage movement in the exposing method in which the stage is intermittently moved so as to obtain the minimum time for protecting a vacuum sealing part, and eliminating unnecessary stationary time. CONSTITUTION:The stage 1 on which material to be exposed 2 is intermittently moved by an external driving mechanism in a vacuum container 5 through a shaft 4 by way of the vacuum seal 6 at every exposure stage. The driving mechanism 3 comprising a pulse motor and the like is controlled by a control circuit 7 which receives signal from a computer 8. In the case the exposing time for the movement of the stage 1 varies, the circuit 7 inspects whether one short pulse having a time length T which has risen up at the last stop falls or not, upon receiving the movement starting instruction from the computer 8. The value of T is made to be the minimum for preventing the burning of the seal 6. If the pulse has fallen, the circuit immediately supplies the driving signal. If the pulse does not fall yet, the circuit waits until the pulse falls, and supplies the driving signal after the fall. Therefore the overall exposing speed can be expedited.