PREPARATION OF TRANSPARENT CONDUCTIVE FILM

PURPOSE:To prepare a thin transparent conductive film haing low areal resistance and composed mainly of indium oxide, easily, by using an evaporation source of metal for reducing the conductivity in combination with the evaporation sourece of indium oxide. CONSTITUTION:The evaporation source 5 in the vacuum chamber 1 evacuated through the port 2, is composed of a mixture of In2O3 and a small amount of SnO2, and is evaporated and deposited to the surface of the glass substrate 3 by the irradiation with electron beam 6. In the above apparatus, for example a W boat 7 is placed in the chamber as shown in the figure, and an evaporation source 8 such as In is put into the boat 7. It is heated with the heater 9, evaporated simultaneously with the evaporation source 5, and deposited to the surface of the plate 3 at a specific mixing ratio. As the evaporation sources are arranged separately, they can be controlled independently and the mixing ratio can be adjusted easily. The deposition may be carried out by alternately using the evaporation sources 5 and 8.