DRY ETCHING DEVICE

PURPOSE:To reduce difference of etching speed within an object to be processed, by a method wherein a gas outlet port of a gas supply tube is disposed near the center of the object, and gas and reactive product are flowed from the center towards the outer circumference. CONSTITUTION:An electrode tab...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	OOTSUBO TOORU
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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