PHOTOELECTRIC TYPE DISPLACEMENT DETECTING DEVICE
PURPOSE:To obtain accurate reference position, by providing a light source and a first scale and a second scale wherein displacement detecting scale stripes, to which the light is irradiated from the light source and which can form the image by interaction, are formed. CONSTITUTION:The displacement...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | PURPOSE:To obtain accurate reference position, by providing a light source and a first scale and a second scale wherein displacement detecting scale stripes, to which the light is irradiated from the light source and which can form the image by interaction, are formed. CONSTITUTION:The displacement detecting scale stripes 16-1 and 16-2 for obtaining the divided outputs whose phases are different by 90 deg. are formed on the upper part of an index scale 14. The displacement detecting scale stripes 20 are formed on the upper part of a main scale 18. Light receiving elements 24-1 and 24-2 are arranged at the positions on a detecor 30 corresponding to the displacement detecting scale stripes 16-1 and 16-2. Reference position detecting scale stripes 32 is formed at the lower part of the displacement detecting scale stripes 20 of the main scale 18. In this constitution, the accurate reference position can be always obtained regardless of the temperature change and the like. |
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