INTERMITTENT OZONE SUPPLY APPARATUS

PURPOSE:To sense the shortage in the amount of the generated ozone and the amount of desorbed ozone in an ozonizer, by sensing the ozone concentration at the outlet of an ozone adsorbing column in an intermittent zone supply apparatus. CONSTITUTION:Oxygen gas is supplied from an oxygen source 4 into an ozonizer 1 to generate ozone, which is then fed to an ozone adsorbing column 2 and adsorbed by silica gel packed therein. In the process, the oxygen gas contained in the ozone is returned to the ozonizer 1 by an oxygen circulating pump 3. A solenoid valve 11 is opened at a regular interval to feed part of the gas expelled from the adsorbing column 2 to an ozone concentration sensor 12 and sense the concentration of the ozone. Even after a given time of ozone accumulation, the shortage in the amount of the generated ozone in the ozonizer 1 and the amount of the desorbed ozone in the adsorbing column 2 is sensed if the sensed concentration of the ozone is a given value or below. The apparatus is inspected and repaired to increase the amount of the ozone from the ozonizer 1 and the amount of desorbed ozone from the adsorbing column 2 to a prescribed amount and prevent the shortage in the supply of the ozone.