PREPARATION OF ELECTRODE FOR LEAN SENSOR
PURPOSE:To form an excellent electrode having high intensity and high stability, by forming a platinum thin film on the surface of an element by sputtering and forming a platinum layer on said film by electroplating. CONSTITUTION:A lower layer of an electrode is made by forming a platinum thin film...
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Zusammenfassung: | PURPOSE:To form an excellent electrode having high intensity and high stability, by forming a platinum thin film on the surface of an element by sputtering and forming a platinum layer on said film by electroplating. CONSTITUTION:A lower layer of an electrode is made by forming a platinum thin film 2 on a masked element. After that, heat treatment is carried out and the sticking intensity of the film 2 to the element is improved and also, the permeability of oxygen into the platinum layer is improved by making the film 2 porous. The element is immersed in an electrolytic solution containing platinum ions and the film 2 of the element is connected to a direct current power source. Further, electroplating is carried out by using platinum as an anode and the upper layer of the electrode is formed. |
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