PREPARATION OF ELECTRODE FOR LEAN SENSOR

PURPOSE:To form an excellent electrode having high intensity and high stability, by forming a platinum thin film on the surface of an element by sputtering and forming a platinum layer on said film by electroplating. CONSTITUTION:A lower layer of an electrode is made by forming a platinum thin film...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: TORISU YOSHIO, KAMO TAKASHI, FURUYA HISANOBU
Format: Patent
Sprache:eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:PURPOSE:To form an excellent electrode having high intensity and high stability, by forming a platinum thin film on the surface of an element by sputtering and forming a platinum layer on said film by electroplating. CONSTITUTION:A lower layer of an electrode is made by forming a platinum thin film 2 on a masked element. After that, heat treatment is carried out and the sticking intensity of the film 2 to the element is improved and also, the permeability of oxygen into the platinum layer is improved by making the film 2 porous. The element is immersed in an electrolytic solution containing platinum ions and the film 2 of the element is connected to a direct current power source. Further, electroplating is carried out by using platinum as an anode and the upper layer of the electrode is formed.