HIGH FREQUENCY ION PLATING DEVICE

PURPOSE:To improve the adhesiveness of evaporating particles on glass substratas and to form good coating films by connecting the glass substrate which is rotating horizontally in a chamber to a cathode via a supporting frame, a fulcrum shaft and a rotary base plate. CONSTITUTION:In a chamber 1, a g...

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Bibliographische Detailangaben
Hauptverfasser:	MURAYAMA YOUICHI, NAGASAWA MITSUO
Format:	Patent
Sprache:	eng
Schlagworte:	CHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREOUSENAMELS CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOIDCHEMISTRY CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL GLASS INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL JOINING GLASS TO GLASS OR OTHER MATERIALS METALLURGY MINERAL OR SLAG WOOL OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL PHYSICS SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS,MINERALS OR SLAGS SURFACE TREATMENT OF GLASS SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION THEIR RELEVANT APPARATUS TRANSPORTING
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Beschreibung
Zusammenfassung:	PURPOSE:To improve the adhesiveness of evaporating particles on glass substratas and to form good coating films by connecting the glass substrate which is rotating horizontally in a chamber to a cathode via a supporting frame, a fulcrum shaft and a rotary base plate. CONSTITUTION:In a chamber 1, a glass substrate 12 is held by a fulcrum shaft 7 secured to a supporting frame 12a, and is rotated and moved in the direction parallel to the chamber 1 in said chamber by a planetary rotating mechanism consisting of a rotating gear 8 meshed with an internal gear 9, and a rotary base plate 4 rotating together with a revolving gear plate 3. The base plate 4 and the ring 9 are insulated respectively from the chamber 1 by insulators 5, 10, and the substrate 12 is connected to an anode via the frame 12a, the shaft 7, the plate 4, a brush 13, a lead wire 17 and a terminal 14, so that the evaporating particles generated from the anode side consisting of a vapor source 15 and a high frequency coil 18 are vapor-deposited efficiently on the glass substrate.