COATING METHOD AND APPARATUS BY UTILIZING ION FOR ELECTRICALLY NON-CONDUCTIVE SUBSTRATE
The present invention is directed to coating low-conductive or non-conductive materials in a vacuum, such as coating electrically-insulating substrates, by operating a plasma source comprising a thermionic cathode and anode with the anode-voltage continuously alternating between an ignition voltage...
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| creator | RIYUUDEIGERU UIRUBERUKU BERUNTO BIYUTSUKEN HERUMUUTO BORINGERU DEIITOMAARU SHIYURUTSUE |
| description | The present invention is directed to coating low-conductive or non-conductive materials in a vacuum, such as coating electrically-insulating substrates, by operating a plasma source comprising a thermionic cathode and anode with the anode-voltage continuously alternating between an ignition voltage UZ and an extinction voltage UL at a frequency of between several kHz and several hundred kHz, the thermionic cathode continuously emitting electrons. |
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CHEMISTRY ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; COATING MATERIAL WITH METALLIC MATERIAL ; COATING METALLIC MATERIAL ; DIFFUSION TREATMENT OF METALLIC MATERIAL ; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL ; METALLURGY ; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</subject><creationdate>1982</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=19820727&DB=EPODOC&CC=JP&NR=S57120666A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25563,76318</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=19820727&DB=EPODOC&CC=JP&NR=S57120666A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>RIYUUDEIGERU UIRUBERUKU</creatorcontrib><creatorcontrib>BERUNTO BIYUTSUKEN</creatorcontrib><creatorcontrib>HERUMUUTO BORINGERU</creatorcontrib><creatorcontrib>DEIITOMAARU SHIYURUTSUE</creatorcontrib><title>COATING METHOD AND APPARATUS BY UTILIZING ION FOR ELECTRICALLY NON-CONDUCTIVE SUBSTRATE</title><description>The present invention is directed to coating low-conductive or non-conductive materials in a vacuum, such as coating electrically-insulating substrates, by operating a plasma source comprising a thermionic cathode and anode with the anode-voltage continuously alternating between an ignition voltage UZ and an extinction voltage UL at a frequency of between several kHz and several hundred kHz, the thermionic cathode continuously emitting electrons.</description><subject>CHEMICAL SURFACE TREATMENT</subject><subject>CHEMISTRY</subject><subject>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</subject><subject>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</subject><subject>COATING MATERIAL WITH METALLIC MATERIAL</subject><subject>COATING METALLIC MATERIAL</subject><subject>DIFFUSION TREATMENT OF METALLIC MATERIAL</subject><subject>INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL</subject><subject>METALLURGY</subject><subject>SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>1982</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZAh39ncM8fRzV_B1DfHwd1Fw9APigADHIMeQ0GAFp0iF0BBPH88okApPfz8FN_8gBVcfV-eQIE9nRx-fSAU_fz9dZ38_l1DnEM8wV4XgUKfgEKBeVx4G1rTEnOJUXijNzaDo5hri7KGbWpAfn1pckJicmpdaEu8VEGxqbmhkYGZm5mhMjBoA3pUxjw</recordid><startdate>19820727</startdate><enddate>19820727</enddate><creator>RIYUUDEIGERU UIRUBERUKU</creator><creator>BERUNTO BIYUTSUKEN</creator><creator>HERUMUUTO BORINGERU</creator><creator>DEIITOMAARU SHIYURUTSUE</creator><scope>EVB</scope></search><sort><creationdate>19820727</creationdate><title>COATING METHOD AND APPARATUS BY UTILIZING ION FOR ELECTRICALLY NON-CONDUCTIVE SUBSTRATE</title><author>RIYUUDEIGERU UIRUBERUKU ; 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| subjects | CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION |
| title | COATING METHOD AND APPARATUS BY UTILIZING ION FOR ELECTRICALLY NON-CONDUCTIVE SUBSTRATE |
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