CENTRALIZED CONTROL SYSTEM FOR SEMICONDUCTOR MANUFACTURING DEVICE

PURPOSE:To prepare a processing specification easily, and to prevent the lowering of the working ratio of a centralized controller by dispersing the memory function of the centralized controller to each semiconductor manufacturing device at a lower rank. CONSTITUTION:A processing specification memory storage 10 memorizing a standard processing specification and a specification previously processed is mounted to each of a plurality of the semiconductor manufacturing devices and the memory function of the centralized controller is dispersed to each semiconductor manufacturing device. Accordingly, the system can be formed at low cost because the memory capacity of the centralized controller may be little and a minimum key board and a character display device may be mounted as specification input means. If the centralized controller gets trouble, the working ratio does not lower because separate semiconductor manufacturing device can execute processes on the basis of the memorized data of memory means attached to these manufacturing devices.