DIFFERENTIAL PROBE INTERFEROMETER

PURPOSE:To obtain a diffractive probe interferometer capable of measuring an extremely short interval by effecting measurement of interference using a reference optical path and a measuring optical path.

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Bibliographische Detailangaben
Hauptverfasser:	HATSUTORI SHIYUUZOU, HIRAMATSU TADAO
Format:	Patent
Sprache:	eng
Schlagworte:	MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING
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Beschreibung
Zusammenfassung:	PURPOSE:To obtain a diffractive probe interferometer capable of measuring an extremely short interval by effecting measurement of interference using a reference optical path and a measuring optical path.