POSITIONING METHOD OF THE PHOTOMASK

PURPOSE:To prevent the error of positioning by using light which is produced by removing the bright line in the mercury-arc lamp by the passing the latter through the multilayered thin film having different refractive index.

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Bibliographische Detailangaben
1. Verfasser:	NISHIZUKA HIROSHI
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY CONTROLLING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS REGULATING SEMICONDUCTOR DEVICES SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
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Beschreibung
Zusammenfassung:	PURPOSE:To prevent the error of positioning by using light which is produced by removing the bright line in the mercury-arc lamp by the passing the latter through the multilayered thin film having different refractive index.