SEMIICONDUCTOR DEVICE

PURPOSE:A metal with high melting point, having low sheet resistance which is used for the elctrode of the metal film gate or metal for wiring, etc., to obtain a temperature-proof oxidized semi-conductor device such as MOSFET which has high-speed action.

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Bibliographische Detailangaben
Hauptverfasser:	FUKUMOTO MASANORI, OOSONE TAKASHI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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Beschreibung
Zusammenfassung:	PURPOSE:A metal with high melting point, having low sheet resistance which is used for the elctrode of the metal film gate or metal for wiring, etc., to obtain a temperature-proof oxidized semi-conductor device such as MOSFET which has high-speed action.