POSITIVE TYPE PHOTOORESISTANT COMPOUND

PURPOSE:To obtain a positive type photo-resistant compound which excels in resolving power and which adheres closely to the base plate and has an excellent etching power.

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Bibliographische Detailangaben
Hauptverfasser: KATOU HIROHISA, TOMII HITOSHI, IKARI KUNIHIRO
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:PURPOSE:To obtain a positive type photo-resistant compound which excels in resolving power and which adheres closely to the base plate and has an excellent etching power.