SPUTTERING DEVICE

PROBLEM TO BE SOLVED: To provide practicable constitution capable of forming uniform erosion on a target without depending on the kinds of gases and forming uniform thin films on a substrate. SOLUTION: Each of plural electromagnet units 8 arranged in a segment form on the side opposite to the surface to be sputtered of the target 5 has electromagnets 81 for setting the magnetic lines 810 of force penetrating the target 5, by which the on and off of the energization to the respective electromagnets 81 and the directions of the currents thereof are controlled. The electromagnets are so controlled that different magnetic poles are attained with the surfaces on the target 5 side of the electromagnets 81 of the inner peripheral electromagnet unit groups 8a among, for example, the several electromagnets 81 and the surfaces of the target 5 side of the electromagnets 81 of the outer peripheral electromagnet unit groups 8b, by which the magnetic fields circumferentially continuous with the arcl-like magnetic lines of force penetrating the target 5 are set between the inner peripheral electromagnet unit groups 8a and the outer peripheral electromagnet unit groups 8b. The electromagnets 81 of the respective electromagnet units 8 are so controlled that the magnetic fields continuous in the circumferential form rotate and revolve.