FORMATION OF FINE STRUCTURE

PROBLEM TO BE SOLVED: To easily obtain a fine structure of desired shape of any material through a relatively simple process by moving a base or electron beams while irradiating the surface of the base with the electron beams so as to gradually increase the relative distance between the base and the electron beams and grow a linear material consisting of the material of the base in between the base and the electron beams. SOLUTION: This fine structure is obtained through the following process: the end of a base 12, e.g. and metal such as Ti, W, Au or Ag, or a semiconductor, is irradiated with pref. electron beams 16 to melt the irradiated portion of the base 12 followed by moving the base 12 or the electron beams 16; thereby atoms are withdrawn from the base 12 by the action of the electron beams 16 to effect formation of a linear material (wire 20) in the space between the base 12 and the electron beams 16. Therefore, there is no limitations in respect of the shape of the linear material as the objective fine structure, enabling this fine structure of three dimensional shape to also be made, affording the fine structure in the form of a linear material about 20 nm in diameter and >=100 in aspect ratio at a growth rate of about 1 μm/min.