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PROBLEM TO BE SOLVED: To prevent degradation of functions of a semiconductor exposing device or the like by orienting the air flow toward the semiconductor exposing device through breathing light catalyst filters of breathing air flow cleaning means and by illuminating the breathing light catalyst f...

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Bibliographische Detailangaben
Hauptverfasser:	TSUYUSAKI HARUO, FUKUDA MAKOTO, OKADA IKUO, SEKIMOTO MISAO
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY CONVEYING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HANDLING THIN OR FILAMENTARY MATERIAL HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PACKING PERFORMING OPERATIONS PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL PHYSICS PNEUMATIC TUBE CONVEYORS SEMICONDUCTOR DEVICES SEPARATION SHOP CONVEYOR SYSTEMS STORING TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To prevent degradation of functions of a semiconductor exposing device or the like by orienting the air flow toward the semiconductor exposing device through breathing light catalyst filters of breathing air flow cleaning means and by illuminating the breathing light catalyst filter of the breathing air flow cleaning means by an illuminating means. SOLUTION: An air flow which is in contact with an outer surface of a semiconductor exposing device 1 is generated by an air flow generating means. Breathing light catalyst filters 21 are disposed by covering or closing an air circulating opening 16 which is provided for connecting chambers 12 and 14 to a bulkhead 6 from the side of the chamber 12 for cleaning the air flow by breathing air cleaning means 20. Illuminating means 22 are disposed above the breathing light catalyst filters 21 in the chamber 12 so that they may not stop the air flow. The light catalyst is pumped by an illuminating light 23 from the illuminating means 24.