X-RAY ANALYZER

PROBLEM TO BE SOLVED: To provide an X-ray analyzer which can prevent the intrusion of a gas filling up the X-ray path of a sample chamber into a vacuum vessel sealing a semiconductor detector, and suppress the consumption of liquid nitrogen used for cooling the semiconductor detector to a fixed rate...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	OONO ICHINAGA, HASHIZUME YUKIRO, KUWATA MASAHIKO
Format:	Patent
Sprache:	eng
Schlagworte:	GAMMA RAY OR X-RAY MICROSCOPES INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES IRRADIATION DEVICES MEASUREMENT OF NUCLEAR OR X-RADIATION MEASURING NUCLEAR ENGINEERING NUCLEAR PHYSICS PHYSICS TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOTOTHERWISE PROVIDED FOR TESTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide an X-ray analyzer which can prevent the intrusion of a gas filling up the X-ray path of a sample chamber into a vacuum vessel sealing a semiconductor detector, and suppress the consumption of liquid nitrogen used for cooling the semiconductor detector to a fixed rate. SOLUTION: An X-ray analyzer is provided with an exciting line generating means 1 which projects an exciting line upon a sample 2; and an X-ray detector 7 which is sealed in a vacuum vessel 4 together with a cooling device 9 and has a first X-ray transmissive layer 3b in which a first gas exists in an X-ray route through which a characteristic X-ray generated from the sample 2 reaches the detector 7. The layer 3b and the route of the characteristic X-ray in the vessel 4 respectively have X-ray transmitting windows 5 and 6 which are separated from each other, and a second X-ray transmissive layer 10 is provided between the windows 5 and 6 so that a second gas may flow through the layer 10.