CONFIGURATION MEASURING EQUIPMENT

PROBLEM TO BE SOLVED: To make it unnecessary to change imaging magnification according to change of the distance from an imaging means to a measuring surface, and accurately measure the profile of the measuring surface, by rectangularly crossing the optical axis direction and the imaging direction,...

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Bibliographische Detailangaben
Hauptverfasser: UENO HIDEJI, YOSHIMURA MASARU, KOJIMA KAZUHITO, SHIMADA NAOTO, ONO TOMOHIKO, TAKIGUCHI HIROSHI, OGASAWARA SHINGO, KUMAKAWA TOMONORI
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To make it unnecessary to change imaging magnification according to change of the distance from an imaging means to a measuring surface, and accurately measure the profile of the measuring surface, by rectangularly crossing the optical axis direction and the imaging direction, in order that the form of a locus image may not be changed by a change in the distance from the imaging means to the measuring surface. SOLUTION: Two couples of irradiating means 12 and imaging means 14 are installed. An object 10 has a U-shaped appearance. The irradiating means 12 and the imaging means 14 which make the respective pairs are so arranged that the optical axis direction of the irradiating means 12 and the imaging direction, i.e., the canter axis of the imaging means 14 cross rectangularly. Thereby the optical path length from the imaging means 14 to a locus forming part position on the measuring surface is made constant independently of a change in distance. From the image of locus obtained by each of the imaging means 14, an image processing equipment 16 obtains the luminance distribution on a scanning line crossing the locus, and supplies the result to an operating equipment 18, which operates a profile of the measuring surface on the basis of the obtained luminance distribution position information, and displays the profile on a display equipment 20.