PRODUCTION OF CUBIC NITRIDED BORON COATING FILM

PROBLEM TO BE SOLVED: To produce the cubic nitrided boron coating film of high hardness on a substrate by generating an arc discharge with boron as a cathode, guiding a boron ion generated to an annular magnetic field of an electromagnetic coil and adhering on a substrate surface in presence of a ni...

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Bibliographische Detailangaben
1. Verfasser:	SOTOZAKI MINEHIRO
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To produce the cubic nitrided boron coating film of high hardness on a substrate by generating an arc discharge with boron as a cathode, guiding a boron ion generated to an annular magnetic field of an electromagnetic coil and adhering on a substrate surface in presence of a nitrogen ion. SOLUTION: A boron cathode 11, in which C, Ca, etc., as impurities are added in =400 deg.C, preferably >=500 deg.C. Successively, an arc discharge is generated between a cathode 15 and an annular anode 17 through a trigger electrode 16. A boron ion 19 generated from the boron cathode 11, while separating a non charged fused material 20 from thereof, is guided to a substrate 21 through a deflection coil 22 and is allowed to reacted with the nitrogen gas on the surface, introduced from a supply pipe 24, a C-BN coating film excellent in wear resistance is adhered/ formed on a substrate surface.