SHAPE MEASURING DEVICE

PROBLEM TO BE SOLVED: To provide a shape measuring device capable of measuring a minute three-dimensional shape. SOLUTION: A probe 1 comprises a tracing needle posture adjusting part 10, a fitting part 11 being the fixed end, a horizontal part 12, a curved part 13, a vertical part 14, and a region 1...

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1. Verfasser:	HIRONO AYUMI
Format:	Patent
Sprache:	eng
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING
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creator	HIRONO AYUMI
description	PROBLEM TO BE SOLVED: To provide a shape measuring device capable of measuring a minute three-dimensional shape. SOLUTION: A probe 1 comprises a tracing needle posture adjusting part 10, a fitting part 11 being the fixed end, a horizontal part 12, a curved part 13, a vertical part 14, and a region 15 being the releasing end, and an end part 16 sharpened in the vertical direction. A scanning device 2 is made up of an X-stage 21, a Y-stage 22, and a Z-stage 23, and carries out main scanning and auxiliary scanning. A contact detecting device 3 is made up of a microscopic optical system consisting of an objective lens 31, a revolver 32 for exchanging objective lens, a halogen light source 33, a coaxial falling-projection lighting mirror cylinder 34, an image pickup part 35 using a two-dimensional CCD camera, and an image processing device 9 connected to the image pickup part. A deflection is caused in the probe 1 when it is brought into contact with a measuring object 5. The contact detecting device 3 detects this deflection, so that the shape of the measuring object 5 can be measured.
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SOLUTION: A probe 1 comprises a tracing needle posture adjusting part 10, a fitting part 11 being the fixed end, a horizontal part 12, a curved part 13, a vertical part 14, and a region 15 being the releasing end, and an end part 16 sharpened in the vertical direction. A scanning device 2 is made up of an X-stage 21, a Y-stage 22, and a Z-stage 23, and carries out main scanning and auxiliary scanning. A contact detecting device 3 is made up of a microscopic optical system consisting of an objective lens 31, a revolver 32 for exchanging objective lens, a halogen light source 33, a coaxial falling-projection lighting mirror cylinder 34, an image pickup part 35 using a two-dimensional CCD camera, and an image processing device 9 connected to the image pickup part. A deflection is caused in the probe 1 when it is brought into contact with a measuring object 5. 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The contact detecting device 3 detects this deflection, so that the shape of the measuring object 5 can be measured.</abstract><edition>6</edition><oa>free_for_read</oa></addata></record>
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subjects	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING
title	SHAPE MEASURING DEVICE
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