SHAPE MEASURING DEVICE

PROBLEM TO BE SOLVED: To provide a shape measuring device capable of measuring a minute three-dimensional shape. SOLUTION: A probe 1 comprises a tracing needle posture adjusting part 10, a fitting part 11 being the fixed end, a horizontal part 12, a curved part 13, a vertical part 14, and a region 15 being the releasing end, and an end part 16 sharpened in the vertical direction. A scanning device 2 is made up of an X-stage 21, a Y-stage 22, and a Z-stage 23, and carries out main scanning and auxiliary scanning. A contact detecting device 3 is made up of a microscopic optical system consisting of an objective lens 31, a revolver 32 for exchanging objective lens, a halogen light source 33, a coaxial falling-projection lighting mirror cylinder 34, an image pickup part 35 using a two-dimensional CCD camera, and an image processing device 9 connected to the image pickup part. A deflection is caused in the probe 1 when it is brought into contact with a measuring object 5. The contact detecting device 3 detects this deflection, so that the shape of the measuring object 5 can be measured.