SEMICONDUCTOR TEST DEVICE
PROBLEM TO BE SOLVED: To reduce the temporary stop period of a device test and improve a throughput by receiving the change setting of the output amplitudes to pin drivers, and directly correcting the delay quantities of variable delay means for the timing correction due to the change of the output...
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Sprache: | eng |
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Zusammenfassung: | PROBLEM TO BE SOLVED: To reduce the temporary stop period of a device test and improve a throughput by receiving the change setting of the output amplitudes to pin drivers, and directly correcting the delay quantities of variable delay means for the timing correction due to the change of the output amplitudes of the pin drivers. SOLUTION: A register 21 latch-holds the delay quantity set values set to variable delay means VDi from a tester bus. A correction function equation 26 is a curve equation analogous to a correction curve. An amplitude correction quantity arithmetic section 24 feeds the result values correction-calculated with the delay quantities of the variable delay means VDi by the function equation 26 each time the voltage set data (VIHi, VILi) setting the output amplitudes of pin drivers are received to one input end of an adding means 22. The adding means 22 receives the delay quantity set values from the register 21 and the arithmetic values from the arithmetic section 24 and feeds the added results of them to the variable delay means VDi. The output timings are directly corrected to the same timing at an optional output amplitude. |
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