SPECKLE PATTERN DISPERSION DEVICE AND LASER BEAM IRRADIATION SYSTEM

PROBLEM TO BE SOLVED: To temporally disperse a speckle pattern to average the speckle pattern. SOLUTION: Laser beam 1 from a laser oscillator 101 is transmitted to an optical fiber 103 through a condenser lens 102; and when laser beam 3 is transmitted through an acoustooptic deflector 109 as laser b...

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Hauptverfasser: KUWABARA KOJI, SASAKI HIROHARU
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To temporally disperse a speckle pattern to average the speckle pattern. SOLUTION: Laser beam 1 from a laser oscillator 101 is transmitted to an optical fiber 103 through a condenser lens 102; and when laser beam 3 is transmitted through an acoustooptic deflector 109 as laser beam 4 of parallel rays by a collimator lens 104, the refractive index of the acoustoopic deflector 109 is temporally changed by the ultrasontic signal from a driving power source 110. Laser beam 4 of parallel rays is made incident on a reflection mirror 105 as speckle pattern dispersion light 5, and this dispersion light 5 is thrown to a processing sample 108 through a uniform intensity distribution optical system 106 as laser beam having a uniform intensity distribution.