GLASSY CARBON PIPE AND ITS PRODUCTION

PROBLEM TO BE SOLVED: To provide a glassy carbon pipe which exhibits excellent corrosion resistance in spite of use as a nozzle for a CVD apparatus and does not contain an inorg. filler which is the cause for the contamination of a CVD film and a process for producing the same. SOLUTION: This proces...

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Hauptverfasser:	HAMAGUCHI MAKI, NISHIZAWA SETSU, OKUMURA TOSHIAKI, KURI TAKESHI
Format:	Patent
Sprache:	eng
Schlagworte:	AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING ARTIFICIAL STONE BLASTING CEMENTS CERAMICS CHEMISTRY COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDINGMATERIALS CONCRETE ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS HEATING INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS JOINTS OR FITTINGS FOR PIPES LIGHTING LIME, MAGNESIA MEANS FOR THERMAL INSULATION IN GENERAL MECHANICAL ENGINEERING METALLURGY PERFORMING OPERATIONS PIPES PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCESIN A PLASTIC STATE REFRACTORIES SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDEDFOR SHAPING OR JOINING OF PLASTICS SLAG SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING THERMAL INSULATION IN GENERAL TRANSPORTING TREATMENT OF NATURAL STONE WEAPONS WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a glassy carbon pipe which exhibits excellent corrosion resistance in spite of use as a nozzle for a CVD apparatus and does not contain an inorg. filler which is the cause for the contamination of a CVD film and a process for producing the same. SOLUTION: This process for producing the glassy carbon pipe made from a thermosetting resin material consists in using a rod which consists of a hot meltable material having the m.p. higher than the curing temp. of a thermosetting resin material and having the m. p. lower than a firing temp. and is formed to a hollow part shape of the glassy carbon pipe as a core 5, putting the thermosetting resin material like a pipe to the circumference of the core, heating the core to the curing temp. of the thermosetting resin material to cure the material, then heating the core 5 above the m.p. of the core to the firing temp. of the thermosetting resin material or below to cause the melting and flowing out of the core and firing the resulted thermosetting resin pipe, thereby forming the glassy carbon pipe 8.