TREATMENT LIQUID SUPPLYING APPARATUS

PROBLEM TO BE SOLVED: To enable easy detection of whether or not a specified amount of treatment liquid has been properly supplied, and to inform of it. SOLUTION: A treatment liquid supplying apparatus is provided with a measuring bath 1, a bellows 10a and an air cylinder 10b, a first and a second p...

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Bibliographische Detailangaben
1. Verfasser:	HIROE TOSHIRO
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOIDCHEMISTRY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL SEMICONDUCTOR DEVICES THEIR RELEVANT APPARATUS TRANSPORTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To enable easy detection of whether or not a specified amount of treatment liquid has been properly supplied, and to inform of it. SOLUTION: A treatment liquid supplying apparatus is provided with a measuring bath 1, a bellows 10a and an air cylinder 10b, a first and a second pressure sensors 31a and 32a, a timer, an anomaly display lamp and a control part. Bellows 10a and the air cylinder 10b send out the treatment liquid from the measuring bath 1. The first and the second pressure sensors 31a and 32a make the control part detect the fact that the specified amount of treatment liquid has been sent out from the measuring bath 1. The control part makes the anomaly display lamp indicate the anomaly, when the operation time of the air cylinder 10b measured by the time which exceeds the specified range of time at the time of detection of sending out of the specified amount of treatment liquid from the measuring bath 1.