FORMATION OF DEPOSITED FILM, MANUFACTURE OF SEMICONDUCTOR DEVICE SUBSTRATE, AND MANUFACTURE OF PHOTOVOLTAIC DEVICE
PROBLEM TO BE SOLVED: To prevent flaws and electrode failure, by applying external stress to the non-deposition surface of a strip-shaped substrate to eliminate curl deformation in the strip-shaped substrate produced by application of deformation stress. SOLUTION: Backside reflective layers 802, 803...
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