SEMICONDUCTOR PRESSURE SENSOR

PROBLEM TO BE SOLVED: To obtain a semiconductor pressure sensor in which the fluctuation of static characteristics and temperature characteristics is suppressed and production yield is enhanced by reducing failure rate. SOLUTION: In a semiconductor pressure sensor 10, bottom face of the mesa structu...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	SUGIMOTO AKIYOSHI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE PHYSICS SEMICONDUCTOR DEVICES TESTING
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