SHADOW MASK INSPECTION METHOD AND INSPECTION DEVICE

PROBLEM TO BE SOLVED: To automatically, correctly, easily detect defects of the hole of a shadow mask by masking a mask signal holding the brightness peak value of its signal in the signal of a hole part to form a differential signal, and processing the differential signal. SOLUTION: Light transmitt...

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Hauptverfasser:	KOBAYASHI TAKAYUKI, SAITO JUNICHI, MIHASHI MITSUSACHI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING METALLURGY MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLICMATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASSC23 AND AT LEAST ONEPROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25 NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE PHYSICS TESTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To automatically, correctly, easily detect defects of the hole of a shadow mask by masking a mask signal holding the brightness peak value of its signal in the signal of a hole part to form a differential signal, and processing the differential signal. SOLUTION: Light transmitted through a hole and its periphery of a shadow mask 107 is inputted in a measuring instrument 104 as an image. An output signal from the measuring instrument 104 is A/D converted. A calculation processing means 105 forms a mask signal holding the brightness peak value of a signal in a hole part from the signal in the hole part of the converted signals by using mathematical form processing. By masking the mask signal in the signal in the hole part, a differential signal is formed. In the differential signal, the ratio occupying in the differential signal of a signal of the edge part of the original hole for judging defects is made larger than the ratio of the signal of the edge part of the original hole occupying in the signal of the original signal to emphasize the judging information of defects. The processing result of the differential signal is displayed on a display device 106.