DOUBLE SURFACE POLISHING MACHINE

PROBLEM TO BE SOLVED: To prevent the deposit and solidification of the slurry by forming a pin of a pin shaft and a collar fitted to the peripheral part of the pin shaft, providing the pin shaft with a groove in a surface thereof, and providing a lower end of the groove thereof with an open hole in...

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Bibliographische Detailangaben
Hauptverfasser: AMANO TAKESHI, KIYONO TOSHIHIRO
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:PROBLEM TO BE SOLVED: To prevent the deposit and solidification of the slurry by forming a pin of a pin shaft and a collar fitted to the peripheral part of the pin shaft, providing the pin shaft with a groove in a surface thereof, and providing a lower end of the groove thereof with an open hole in the peripheral direction of the pin. SOLUTION: A work is pinched for pushing by an upper and a lower plates while always supplying the slurry including the abrasive granular powder, and a surface plate and the work are rotated for working. The slurry is evenly distributed over the whole of a polishing surface, and discharged. This slurry enters a narrow space between a pin shaft 10 and a collar 12. In this case, since the slurry entered inside of the pin structure is flowed downward along a groove 11a and discharged through an open hole 11b, hindrance of the smooth rotation of the collar 12 by the solidification and deposit of the slurry inside is prevented.