IC TESTING APPARATUS

PROBLEM TO BE SOLVED: To obtain an IC testing apparatus which can confirm the rise time and the fall time of a drive signal which could not be confirmed in conventional cases, by a method wherein an evaluation means is provided and whether the rise time and the fall time of a detection signal are good or not is judged before inspection. SOLUTION: When the terminal of a pin No. 1 at a device X to be measured is inspected, a driver 2 and a relay 4 are connected by a switch 3, and a comparator 8 inputs a drive signal. In addition, the output value V1 H (or L) of a D/A converter 14a1 (or 15a1 ) is inputted as an H (or L) level threshold value. The driver 2 inputs the output voltage V1 H (or L) as the standard value at the H (or L) level of the drive signal, and it sets the H (or L) level of the drive signal at the voltage V1 H (or L). The drive signal is supplied to the terminal of the pin No. 1 via the relay 4, and the comparator 8 shapes the drive signal to a waveform of a signal to be inspected. A judgment circuit 9 samples the signal, it computes the rise time and the fall time of the signal on the basis of its waveform data, it compares the signal with a standard value which prescribed a normal drive signal, and it judged whether the rise time and the fall time are good or not.