HYDROAROMATIC OXYACETIC ACID TERT-BUTYL ESTER

PROBLEM TO BE SOLVED: To obtain a new compound suitably useful as a dissolution inhibitor for a chemical amplification type resist having both etching resistance and transparency. SOLUTION: This compound is shown by formula I (X is OH, a 1-4C alkyl, a 1-4C alkoxy or a 5-6 cycloalkyl; (m) and (a) are each 0, 1 or 2) such as 1-t- butoxycarbonylmethyleneoxy-2-cyclohexylcyclohexane. The compound of formula I is obtained, for example, by reacting (A) 1 mol part of a phenol of formula II with (B) >=n mol parts of a haloacetic acid t-butyl ester (e.g. chloroacetic acid-t-butyl ester) to give (C) an aromatic oxyacetic acid t-butyl ester of formula III and hydrogenating the component C in the presence of (D) a hydrogenating metal catalyst. A noble metal catalyst, a noble metal supporting catalyst, a noble metal complex catalyst or the like is preferably used as the component D.