ANGULAR VELOCITY DETECTING SENSOR

PROBLEM TO BE SOLVED: To match resonance frequencies in the direction of tuning-fork oscillation with resonance frequencies in the direction of detection of Corioli's forced easily to improve detection sensitivity, by structuring a tuning-fork oscillating beam and an oscillating beam for detecting Corioli's force to be joined with the tuning-fork oscillating beam so that they can be individually worked on. SOLUTION: An angular velocity detecting sensor is constituted of, for example, the first silicon substrate 11 and the second silicon substrate 13 joined with the first silicon substrate 11 via a silicon oxide film intermediate layer 12. Detecting beams 18a and 18b are formed by partially removing the first silicon substrate 11 by etching, and oscillating beams 17a and 17b are formed by similarly working on the second silicon substrate 13. Then, for example, wiring 31 for A.C. energization is energized to oscillate the oscillating beams 17a and 17b by Lorentz's force by the magnetic field of a magnet 15, and the deflections of the detecting beams 18a and 18b are detected as voltage changes in piezoelectric thin films 33a and 33b. The length and thickness of each beam is regulated so that the resonance frequency of each detecting beam in the direction of a Z-axis may be equal to the resonance frequency of each oscillating beam.