PATTERN FORMING DEVICE AND METHOD THEREFOR
PROBLEM TO BE SOLVED: To drastically shorten a process and to save materials by detecting the pattern position already written on a substrate, aligning a head and discharging a writing resin from the head by the position of the substrate while moving the substrate within a plane parallel with the he...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | PROBLEM TO BE SOLVED: To drastically shorten a process and to save materials by detecting the pattern position already written on a substrate, aligning a head and discharging a writing resin from the head by the position of the substrate while moving the substrate within a plane parallel with the head, thereby having the arbitrary patterns written. SOLUTION: When the pattern is already written on the substrate 1 after the distance alignment between the head and the substrate, an X-Y stage 6 is moved to an alignment detection position and the alignment detection between the already written part and the head is executed by an alignment detector 4. The alignment is then executed by an actuator for θ driving on an θ-Z-tilt state 7. The actuator is thereafter moved to a writing start position by the X-Y stage 6 and the arbitrary patterns are written while the writing head 2 is subjected to the control of the discharge position and the discharge nozzle by a discharge control section 70. As a result, the drastic process shortening and material saving are made possible. |
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