SURFACE TREATMENT OF STAMPER FOR OPTICAL DISK

PROBLEM TO BE SOLVED: To enhance productivity and to facilitate the maintenance and management of a treatment system by supplying a oxidation treating liquid to a stamper surface to execute an oxidation treatment for a prescribed time, rotating the stamper and supplying washing water to wash the stamper, thereby efficiently executing the oxidation treatment and washing. SOLUTION: The inner peripheral hole of the stamper 1 is inserted into the central projection 2a of a turntable 2 and the stamper 1 is set horizontally on the turntable 2. A prescribed amt. of the oxidation treating liquid is supplied to the surface of the stamper 1 through the nozzle of an oxidation treating liquid supply pipe 5 from an oxidation treating liquid vessel 4 and is held for a specified time, by which the surface of the stamper 1 is subjected to the oxidation treatment. The stamper 1 is subjected, after the oxidation treatment, to shaking off and removing of the oxidation treating liquid on the surface with centrifugal force by rotating the turntable 2 with a drive source 3 and the washing water is supplied from a washing water supply pipe 6 to wash the surface of the stamper 1. The oxidation treating liquid is preferably an aq. soln. of hydrogen peroxide in terms of corrosiveness. As a result, there is no fluctuation in the concn. of the oxidation treating liquid and the occurrence of defective articles is drastically reduced.