SURFACE TREATMENT OF GLASS SUBSTRATE AND SURFACE TREATMENT APPARATUS

PROBLEM TO BE SOLVED: To provide a surface treatment method for a glass substrate capable of stably forming a liquid layer of a surface treating liquid, such as developer, onto the glass substrate. SOLUTION: This surface treatment method of the glass substrate includes a surface treating stage, wash...

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1. Verfasser: HINO MARI
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To provide a surface treatment method for a glass substrate capable of stably forming a liquid layer of a surface treating liquid, such as developer, onto the glass substrate. SOLUTION: This surface treatment method of the glass substrate includes a surface treating stage, washing stage and drying stage for the glass substrate, in which supporting members for support are erected on the rear surface in the short side part of the glass substrate at the time of forming the liquid layer by applying the surface treating liquid from a surface treatment nozzle onto the glass substrate placed on a rotary chuck. As a result, the glass substrate is held flat in the state of placing the glass substrate on the rotary chuck, by which the spilling of the surface treating liquid is prevented. In washing or rotating of the glass substrate, the rotary chuck and the supporting members are relatively moved in such a manner that the supporting member do not come into contact with the glass substrate.