PRODUCTION OF SILICON CARBIDE SINTERED COMPACT MEMBER
PROBLEM TO BE SOLVED: To provide a method for producing a silicon carbide sintered compact member capable of not only suppressing the release of pollutants such as metals but also nearly completely deterring the release and migrating pollution of a sintering assistant contained in a silicon carbide...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a method for producing a silicon carbide sintered compact member capable of not only suppressing the release of pollutants such as metals but also nearly completely deterring the release and migrating pollution of a sintering assistant contained in a silicon carbide sintered compact from the surface. SOLUTION: The surface of a silicon carbide sintered compact member containing a sintering assistant and subjected to machining after sintering is washed to remove sticking particles. The washed sintered compact member is dried and then heat-treated in an oxidizing atmosphere to oxidize the surface thereof. The produced oxide film layer is removed by washing with an acid and the resultant silicon carbide sintered compact member is further subjected to a heating and purifying treatment in an inert gas atmosphere or a hydrogen chloride-containing gas atmosphere. |
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