METHOD AND DEVICE FOR CONTROLLING TEMPERATURE

PROBLEM TO BE SOLVED: To improve thermal response and to accurately control the temperature of an object. SOLUTION: When a heating means 40 is operated by operation of a separation pin means 30, a heat plate 41 and a cooling plate 10 are positioned away from each other. A heater is positioned both o...

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1. Verfasser: KADOTANI KANICHI
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To improve thermal response and to accurately control the temperature of an object. SOLUTION: When a heating means 40 is operated by operation of a separation pin means 30, a heat plate 41 and a cooling plate 10 are positioned away from each other. A heater is positioned both on upper and lower surfaces of the heat plate 41, respectively, for constituting the heating means 40. A separation means is so allocated as to penetrate a base stage while vertically moving, and when the heating means 40 is operated, the heat plate 41 is moved upward relative to the base stage.