SAMPLE TRANSFER DEVICE AND METHOD FOR ELECTRON MICROSCOPE

PROBLEM TO BE SOLVED: To operate a motor by the most suitable driving pulse for a position where a sample is transferred. SOLUTION: A drive command pulse is sent to a pulse generating circuit 26 from a controller 25. The pulse generating circuit 26 generates a driving pulse with the maximum pulse width based on the drive command pulse, and supply it to a motor driving circuit 27. When a torque for a position where a sample is transferred is big, the motor is not immediately operated by the driving pulse, and it starts operating after a considerable delay. An encoder 24 generates an encoder signal after a considerable delay from a rise of the driving pulse. The encoder signal is fed back to the pulse generating circuit 26, and a part of the driving pulse generated after a rise of the encoder signal is cancelled. The pulse generating circuit 26 is narrower than the driving pulse, however it generates a driving pulse with a big width capable of coping with transfer to a position requiring a big torque.