MANUFACTURE FOR MAGNETIC DISK

PROBLEM TO BE SOLVED: To enhance efficiency for removing minute foreign matters remaining at a surface of a carbonaceous protecting film by carrying out scrubbing by means of a roll after cleaning by a tape. SOLUTION: In scrubbing after cleaning by a tape thereby removing minute protrusions and foreign matters, a disk 1 is supported at the outer circumference by a plurality of disk transfer rollers 2. A roll scrub 3 has its shaft connected to a motor 6 and is supported to be in touch with a surface of the disk 1 with a predetermined pressure. A nozzle 5 is arranged at a position where a cleaning solution is supplied to the surface of the disk 1 and roll scrub 3. In this state, the roll scrub 3 is rotated while the cleaning solution is supplied from the nozzle 5, and at the same time, the disk 1 is moved by the transfer rollers 2, so that the surface of the disk 1 is cleaned. In order to remove static electricity, a conductive spindle is used to clean while a substrate is grounded. The transfer rollers 2 consisting of a static remover brush or conductive member are kept in touch with the disk 1 to clean the disk, thus enhancing cleaning effect.