MICROSCOPE WITH SCANNING UNIT, AND ARRANGEMENT THEREFOR AND OPERATION METHOD THEREFOR

PROBLEM TO BE SOLVED: To couple radiation, preferably, laser radiation, to a scanning head having a scanning unit deflecting at least two-dimensionally. SOLUTION: In this microscope, radiation, preferably, laser radiation, is focused on an object 5 through an objective lens 4 of the microscope M, an...

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Bibliographische Detailangaben
Hauptverfasser: HARTMUT HEINZ, WILHELM STEFAN DR, BERNHARD GRABLER, SIMON ULRICH, GUENTER SCHOPPE
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To couple radiation, preferably, laser radiation, to a scanning head having a scanning unit deflecting at least two-dimensionally. SOLUTION: In this microscope, radiation, preferably, laser radiation, is focused on an object 5 through an objective lens 4 of the microscope M, and is coupled to a scanning head S through at least one visible ray optical fiber 14, and collimator lenses 16 for collimating the exiting radiation diverged at the fiber end parts are arranged at the fiber end parts of the scanning head, and couple the radiation, preferably, the laser radiation, to the scanning head S having a scanning unit 34 deflecting at least two-dimensionally.