ZINC OXIDE THIN FILM FORMING DEVICE, FORMATION OF ZINC OXIDE THIN FILM AND PRODUCTION OF SEMICONDUCTOR DEVICE SUBSTRATE AND PHOTOVOLTAIC ELEMENT USING THE THIN FILM

PROBLEM TO BE SOLVED: To provide a method for forming a zinc oxide thin film of electrolytic deposition by which the deposition of the film on the backside of a substrate is prevented. SOLUTION: A counter electrode 204 is disposed in the plane of projection of the principal plane of a conductive sub...

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1. Verfasser: IWATA MASUMITSU
Format: Patent
Sprache:eng
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