ZINC OXIDE THIN FILM FORMING DEVICE, FORMATION OF ZINC OXIDE THIN FILM AND PRODUCTION OF SEMICONDUCTOR DEVICE SUBSTRATE AND PHOTOVOLTAIC ELEMENT USING THE THIN FILM

PROBLEM TO BE SOLVED: To provide a method for forming a zinc oxide thin film of electrolytic deposition by which the deposition of the film on the backside of a substrate is prevented. SOLUTION: A counter electrode 204 is disposed in the plane of projection of the principal plane of a conductive sub...

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1. Verfasser:	IWATA MASUMITSU
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS THEREFOR BASIC ELECTRIC ELEMENTS CHEMISTRY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROFORMING ELECTROLYTIC OR ELECTROPHORETIC PROCESSES METALLURGY PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTIONOF COATINGS SEMICONDUCTOR DEVICES
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Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a method for forming a zinc oxide thin film of electrolytic deposition by which the deposition of the film on the backside of a substrate is prevented. SOLUTION: A counter electrode 204 is disposed in the plane of projection of the principal plane of a conductive substrate 203 from the perpendicular direction in an aq. soln. contg. zinc ion. Accordingly, when this method is applied in the solar cell forming process, the short-circuit current density of the solar cell and the conversion efficiency are increased and further the yield and durability are improved.