MANAGEMENT OF PERIOD OF FACILITY PRECAUTION MAINTENANCE OF SEMICONDUCTOR MANUFACTURING FACILITITY MANAGEMENT SYSTEM

PROBLEM TO BE SOLVED: To provide a method for managing a period of facility precaution maintenance of a semiconductor manufacturing facility management system, which can prevent facility damage caused by worker's decision error for the period of precaution maintenance. SOLUTION: The method incl...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	SAI ZAISHO, JANG JAE-MAN, TEI SHUN
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CALCULATING CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION ORPROCESSING OF GOODS COMPUTING CONTROL OR REGULATING SYSTEMS IN GENERAL CONTROLLING COUNTING ELECTRIC DIGITAL DATA PROCESSING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FUNCTIONAL ELEMENTS OF SUCH SYSTEMS GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS PHYSICS REGULATING SEMICONDUCTOR DEVICES TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINSTCLIMATE CHANGE
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a method for managing a period of facility precaution maintenance of a semiconductor manufacturing facility management system, which can prevent facility damage caused by worker's decision error for the period of precaution maintenance. SOLUTION: The method includes a step S10 of receiving operating parameter data from each facility, a step S20 of searching for a precaution maintenance period specification table, a step S30 of judging whether or not the value of the operating parameter data is not less than a specification data value in the precaution maintenance period specification table, a step S40 of changing a variable ID for a specific facility which issued the specific parameter data when the specific value in the operating parameter data values is not less than the specification data value, and a step S50 of carrying the variable ID in a facility control message and then downloading the facility control message in the specific facility to change the operating condition of the specific facility. As a result, quick precaution maintenance can be carried out in each facility at good timing without intervention of a worker.