MANUFACTURE OF FLUORESCENT CHARACTER DISPLAY TUBE GRID

PROBLEM TO BE SOLVED: To precisely manufacture with precise dimensions for a grid by obtaining a resist correction quantity based upon a side etch quantity calculation curve indicating a relationship between width dimensions and coefficient of each grid. SOLUTION: Four levels (about 50 microns, abou...

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1. Verfasser: MAKINO SEIJI
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To precisely manufacture with precise dimensions for a grid by obtaining a resist correction quantity based upon a side etch quantity calculation curve indicating a relationship between width dimensions and coefficient of each grid. SOLUTION: Four levels (about 50 microns, about 0.3 mm, about 1.0 mm, and 20 mm or more) of width dimensions of each constituting a fluorescent display tube grid and coefficients conforming to each level are empolyed, and a side etch quantity calculation curve is created. When the width dimensions of each is between these levels each, a coefficient corresponding to the width dimensions at that is set based upon the side etch calculation curve. For example, with its width of 50 microns at level, 0.15 is set as a coefficient for the width dimensions of 50 microns. 7.5 microns that is a product between this coefficient 0.15 and the width dimensions 50 microns is set as a resist correction quantity. A resist correction quantity in the range of ±20% of this resist correction quantity is provided as an extension to an etching resist pattern at the part.