WINDING DEVICE IN VACUUM VESSEL

PROBLEM TO BE SOLVED: To suppress the generation of wrinkles caused by local sagging at the time of carrying a substrate material 102 to be vapor-deposited in a vacuum vessel and to improve the yield of the product. SOLUTION: In a vacuum vessel 110 of a vapor deposition device 101, by providing a gu...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	TAKAI MITSURU, KANAZAWA HIROMICHI
Format:	Patent
Sprache:	eng
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL CONVEYING DIFFUSION TREATMENT OF METALLIC MATERIAL HANDLING THIN OR FILAMENTARY MATERIAL HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS,CABLES INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY PACKING PERFORMING OPERATIONS STORING SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TRANSPORTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To suppress the generation of wrinkles caused by local sagging at the time of carrying a substrate material 102 to be vapor-deposited in a vacuum vessel and to improve the yield of the product. SOLUTION: In a vacuum vessel 110 of a vapor deposition device 101, by providing a guide roll 201 carrying a tapelike substrate material 102 to be vapor-deposited with a taper part in which the diameter is gradually increased in the outside direction of both ends of the substrate material to be vapor- deposited at the position corresponding to both end parts in the width direction of the substrate material 102 to be vapor-deposited, the generation of wrinkles caused by local sagging generated in the substrate material 102 to be vapor- deposited can be suppressed. Moreover, by executing the temp. control of the surface of the guide roll, the effect of preventing the generation of wrinkles can be increased.