DISCRIMINATING DEVICE AND METHOD OF CASSETTE PARTITION FORMING SUPPORTER FROM DISCOIDAL OBJECT

PROBLEM TO BE SOLVED: To avert adverse effects to an object by a method, wherein the precision in the position measurement of partition and an object as well as the reliability upon recognition by discrimination of cassette kinds are improved. SOLUTION: Various supporters for object discriminated by...

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Bibliographische Detailangaben
Hauptverfasser:	VORBERG PETER, ROESSLER MANFRED
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CONVEYING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HANDLING THIN OR FILAMENTARY MATERIAL PACKING PERFORMING OPERATIONS PNEUMATIC TUBE CONVEYORS SEMICONDUCTOR DEVICES SHOP CONVEYOR SYSTEMS STORING TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To avert adverse effects to an object by a method, wherein the precision in the position measurement of partition and an object as well as the reliability upon recognition by discrimination of cassette kinds are improved. SOLUTION: Various supporters for object discriminated by an object 3 and the displacement arrangement on a measurement plane E-E extend into measurement fluxes 11, 12 on the end side. Respective measurement fluxes 11, 12 are positioned in the region of only a single kind supporter 1. The end side of the supporter 1 is detected completely by the measurement fluxes 11, 12 on the measurement plane E-E on the extension part. This device is used for manufacturing an integrated circuit.