SEMICONDUCTOR-TESTING DEVICE

PROBLEM TO BE SOLVED: To provide a semiconductor-testing device for simultaneously performing parallel processing to a plurality of DUTs, for shortening test time, and for improving test efficiency. SOLUTION: A comparator 14 compares output data being obtained by giving a test pattern where an ALPG 12 is generated at a plurality of DUTs 13 with expectation value data being stored into an expectation value memory 17 and creates fail information, a CPU 21 uses the fail information and obtains a relief solution, a substitution data creation part 25 uses the relief solution and expectation value data and creates substitution data, and a substitution data memory and a writing circuit 16 give the substitution data to the corresponding DUT 13 in parallel and processes writing, thus shortening test time.