PIEZOELECTRIC VIBRATION PARTS
PROBLEM TO BE SOLVED: To provide piezoelectric vibration parts with high resonance frequency precision and with a high resonance characteristic Q-value by permitting the surface of an adhered object added to a vibrating part to be a recessed and projected surface and constituting the parts so as to...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide piezoelectric vibration parts with high resonance frequency precision and with a high resonance characteristic Q-value by permitting the surface of an adhered object added to a vibrating part to be a recessed and projected surface and constituting the parts so as to permit the surface coarseness of the recessed and projected surface to satisfy a specified condition. SOLUTION: A piezoelectric substrate 1 and the adhered object 2 are included and the piezoelectric substrate 1 is planarly constituted by a piezoelectric ceramic material. The piezoelectric substrate 1 is provided with the vibrating part 3 and the vibrating part e includes a front vibration electrode 31 and a rear vibration electrode. The adhered object 2 is added to the vibration part 3 and adhered so as to cover the front vibration electrode 31 which constitutes the vibrating part 3. The adhered object 2 is constituted by resins. The resins are adhered so as to cover the whole front vibration electrode 31 which constitutes the vibration part 3. Here, the surface of the adhered object 2 is made to be the recessed and projected one and the surface coarseness is difined by Rmax, then the standardized surface coarseness Ro defined by (Rmax/λo) is made to satisfy Ro |
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